𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Spectroscopic ellipsometry during metalorganic vapor phase epitaxy of InN

✍ Scribed by T. Schmidtling; M. Drago; U.W. Pohl; W. Richter


Book ID
108341740
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
219 KB
Volume
248
Category
Article
ISSN
0022-0248

No coin nor oath required. For personal study only.


πŸ“œ SIMILAR VOLUMES


Development of InN metalorganic vapor ph
✍ M. Drago; C. Werner; M. Pristovsek; U. W. Pohl; W. Richter πŸ“‚ Article πŸ“… 2005 πŸ› John Wiley and Sons 🌐 English βš– 151 KB

## Abstract Metalorganic vapor phase epitaxy of InN layers on sapphire was studied in‐situ by spectroscopic ellipsometry (SE), ex‐situ atomic force microscopy and optical microscopy. Surface morphology has been largely improved by using nitrogen instead of hydrogen as carrier gas during sapphire ni

Platinum-catalyst-assisted metalorganic
✍ Kohei Sasamoto; Ken-ichi Sugita; Akihiro Hashimoto; Akio Yamamoto πŸ“‚ Article πŸ“… 2011 πŸ› Elsevier Science 🌐 English βš– 329 KB

This paper reports the first attempt of the Pt-catalyst-assisted MOVPE growth of InN. In order to enhance NH 3 decomposition at a relatively low growth temperature ($ 550 1C), Pt is used as a catalyst. The catalyst is installed in the NH 3 introduction tube in the MOVPE reactor and the tube is locat