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Laser-Assisted Metalorganic Vapor-Phase Epitaxy (LMOVPE) of Indium Nitride (InN)

✍ Scribed by Bhuiyan, A.G. ;Tanaka, T. ;Yamamoto, A. ;Hashimoto, A.

Publisher
John Wiley and Sons
Year
2002
Tongue
English
Weight
124 KB
Volume
194
Category
Article
ISSN
0031-8965

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Development of InN metalorganic vapor phase epitaxy using in-situ spectroscopic ellipsometry
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## Abstract Metalorganic vapor phase epitaxy of InN layers on sapphire was studied in‐situ by spectroscopic ellipsometry (SE), ex‐situ atomic force microscopy and optical microscopy. Surface morphology has been largely improved by using nitrogen instead of hydrogen as carrier gas during sapphire ni