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Thermal stability of Ni–Pt–Ta alloy silicides on epi-Si1−xCx

✍ Scribed by Jung-Ho Yoo; Hyun-Jin Chang; Byoung-Gi Min; Dae-Hong Ko; Mann-Ho Cho; Hyunchul Sohn; Tae-Wan Lee

Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
641 KB
Volume
154-155
Category
Article
ISSN
0921-5107

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