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Electrical demonstration of thermally stable Ni silicides on Si1−xCx epitaxial layers

✍ Scribed by V. Machkaoutsan; P. Verheyen; M. Bauer; Y. Zhang; S. Koelling; A. Franquet; K. Vanormelingen; R. Loo; C.S. Kim; A. Lauwers; N. Horiguchi; C. Kerner; T. Hoffmann; E. Granneman; W. Vandervorst; P. Absil; S.G. Thomas

Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
644 KB
Volume
87
Category
Article
ISSN
0167-9317

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