Thermal stability enhancement of silicides by using N2 and Ar implantation

✍ Scribed by Tuung Luoh; Maggie Liou; Hung-Wei Liu; Chin-Ta Su; Yung-Tai Hung; Ling-Wuu Yang; Chi-Tung Huang; Kuang-Chao Chen; Henry Chung; Joseph Ku; Chih-Yuan Lu

• Book ID: 103860269
• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 205 KB
• Volume: 237
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2005.04.103