The Growth and Thermal Stability of Ti-Silicides Obtained by Metal Vapor Vacuum Arc Ion Source Implantation

✍ Scribed by Wang, Shuangbo ;Liang, Hong ;Zhu, Peiran

• Publisher: John Wiley and Sons
• Year: 2000
• Tongue: English
• Weight: 114 KB
• Volume: 179
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/1521-396x(200005)179:1<95::aid-pssa95>3.0.co;2-s