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Thermal solid phase epitaxial growth and ion-beam induced crystallisation of Ge+ ion implanted layers in silicon

✍ Scribed by P. Songsiriritthigul; G. Holmén


Book ID
114168423
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
511 KB
Volume
120
Category
Article
ISSN
0168-583X

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