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Thermal oxidation of Si (001) single crystal implanted with Ge ions

✍ Scribed by Terrasi, A.; Scalese, S.; Re, M.; Rimini, E.; Iacona, F.; Raineri, V.; La Via, F.; Colonna, S.; Mobilio, S.


Book ID
119962725
Publisher
American Institute of Physics
Year
2002
Tongue
English
Weight
557 KB
Volume
91
Category
Article
ISSN
0021-8979

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