Ring-like craters in single-crystal Si, Ge, and GaAs by deuterium-ion implantation

✍ Scribed by Yoshihiro Tagishi; Tatuya Katabuchi

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 503 KB
• Volume: 195
• Category: Article
• ISSN: 0375-9601
• DOI: 10.1016/0375-9601(94)90435-9