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Thermal oxidation of Ge-implanted Si: Role of defects

✍ Scribed by S.N. Dedyulin; L.V. Goncharova

Book ID: 113823375
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 275 KB
Volume: 272
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2011.01.095

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