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Thermal Nitridation of SiO2 Thin Films in NH3 + H2O (or O2) Mixtures

✍ Scribed by Bureau, J. C. ;Glachant, A. ;Balland, B.

Publisher: John Wiley and Sons
Year: 1990
Tongue: English
Weight: 610 KB
Volume: 120
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.2211200223

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