Thermal Decomposition of Low Dielectric Constant Pulsed Plasma Fluorocarbon Films: I. Effect of Precursors and Substrate Temperature

✍ Scribed by Cruden, Brett

• Book ID: 126052031
• Publisher: The Electrochemical Society
• Year: 1999
• Tongue: English
• Weight: 959 KB
• Volume: 146
• Category: Article
• ISSN: 0013-4651
• DOI: 10.1149/1.1392679