✦ LIBER ✦
The effect of PECVD plasma decomposition on the wettability and dielectric constant changes in silicon modified DLC films for potential MEMS and low stiction applications
✍ Scribed by Ogwu, A. A.; Okpalugo, T. I. T.; McLaughlin, J. A. D.
- Book ID
- 121194310
- Publisher
- American Institute of Physics
- Year
- 2012
- Tongue
- English
- Weight
- 468 KB
- Volume
- 2
- Category
- Article
- ISSN
- 2158-3226
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