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Thermal conductivity of ultra low-k dielectrics

✍ Scribed by A Delan; M Rennau; S.E Schulz; T Gessner

Book ID: 108411333
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 213 KB
Volume: 70
Category: Article
ISSN: 0167-9317
DOI: 10.1016/s0167-9317(03)00417-9

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