An investigation of ultra low-k dielectrics with high thermal stability for integration in memory devices

✍ Scribed by E. Hong; S. Demuynck; Q.T. Le; M. Baklanov; L. Carbonell; M. Van Hove; H. Meynen

• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 501 KB
• Volume: 84
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2007.05.040