Electrical and adhesion properties of plasma-polymerised ultra-low k dielectric films with high thermal stability

✍ Scribed by M Uhlig; A Bertz; M Rennau; S.E Schulz; T Werner; T Gessner

• Publisher: Elsevier Science
• Year: 2000
• Tongue: English
• Weight: 723 KB
• Volume: 50
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/s0167-9317(99)00258-0