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Thermal conductivity study of porous low-k dielectric materials

โœ Scribed by Hu, Chuan; Morgen, Michael; Ho, Paul S.; Jain, Anurag; Gill, William N.; Plawsky, Joel L.; Wayner, Peter C.


Book ID
121335734
Publisher
American Institute of Physics
Year
2000
Tongue
English
Weight
306 KB
Volume
77
Category
Article
ISSN
0003-6951

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