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Thermal conductivity and sound velocity measurements of plasma enhanced chemical vapor deposited a-SiC:H thin films

✍ Scribed by D.B. Hondongwa; L.R. Olasov; B.C. Daly; S.W. King; J. Bielefeld

Book ID: 113937039
Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 386 KB
Volume: 519
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2011.05.014

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