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Thermal clustering of very thin oxide formed on Si surfaces by N2OO2 adsorption

✍ Scribed by Yoshihiro Kobayashi; Kuniyil Prabhakaran; Toshio Ogino

Book ID: 116067009
Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 987 KB
Volume: 329
Category: Article
ISSN: 0039-6028
DOI: 10.1016/0039-6028(95)00065-8

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