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Growth of thin SiO2 films on clean Si (111) surfaces by low-pressure oxidation and their evaporation

✍ Scribed by Oertel, G. ;Weber, E.-H.

Book ID: 105372497
Publisher: John Wiley and Sons
Year: 1977
Tongue: English
Weight: 634 KB
Volume: 43
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.2210430114

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