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X-ray diffraction evidence for the existence of epitaxial microcrystallites in thermally oxidized SiO2 thin films on Si(111) surfaces

✍ Scribed by T. Shimura; H. Misaki; M. Umeno; I. Takahashi; J. Harada


Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
354 KB
Volume
166
Category
Article
ISSN
0022-0248

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