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Consumption kinetics of Si atoms during growth and decomposition of very thin oxide on Si(001) surfaces

✍ Scribed by Shuichi Ogawa; Akitaka Yoshigoe; Shinji Ishidzuka; Yuden Teraoka; Yuji Takakuwa


Book ID
108289005
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
347 KB
Volume
508
Category
Article
ISSN
0040-6090

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