Thermal annealing effect on material characterizations of β-Ga2O3 epilayer grown by metal organic chemical vapor deposition

✍ Scribed by Huang, Chiung-Yi; Horng, Ray-Hua; Wuu, Dong-Sing; Tu, Li-Wei; Kao, Hsiang-Shun

• Book ID: 120390791
• Publisher: American Institute of Physics
• Year: 2013
• Tongue: English
• Weight: 756 KB
• Volume: 102
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.4773247