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Characterization of β-Ga2O3 epitaxial films grown on MgO (111) substrates by metal-organic chemical vapor deposition

✍ Scribed by Wei Mi; Jin Ma; Caina Luan; Yu Lv; Hongdi Xiao; Zhao Li


Book ID
116731008
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
738 KB
Volume
87
Category
Article
ISSN
0167-577X

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Two micrometers thick (Pb, La)(Zr, Ti)O 3 [PLZT] films with wide composition range were epitaxially grown on (1 0 0)SrRuO 3 bottom electrode layers epitaxially grown (1 0 0) SrTiO 3 substrates by metal organic chemical vapor deposition. Constituent phase of the films were found to be almost the same