Theoretical simulation of backscattered electron images of Si/SixGe1-xstructures with a scanning electron microscope

✍ Scribed by Angela C. De Riccardis; Pier Giorgio Merli; Michele Nacucchi; Leander Tapfer

• Publisher: Springer
• Year: 1994
• Tongue: English
• Weight: 304 KB
• Volume: 114-115
• Category: Article
• ISSN: 0026-3672
• DOI: 10.1007/bf01244551