𝔖 Bobbio Scriptorium
✦   LIBER   ✦

The use of elastic peak spectroscopy in depth profiling

✍ Scribed by M Menyhard; A Konkol; G Gergely; A Barna

Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
90 KB
Volume
46
Category
Article
ISSN
0042-207X

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Determination of the Ion Sputtering-indu
Determination of the Ion Sputtering-induced In-depth Distribution by Means of Elastic Peak Electron Spectroscopy
✍ Konkol, A.; Menyhard, M. πŸ“‚ Article πŸ“… 1997 πŸ› John Wiley and Sons 🌐 English βš– 243 KB πŸ‘ 2 views

Elastic peak depth proÐling was carried out on an Mo/Si multilayer system using a rotating specimen, grazing angle of incidence (86Γ„ with respect to the surface normal) and 0.5 keV Ar ion energy. The depth proÐling was simulated by dynamic TRIM (T-DYN) code. The T-DYN code provided the in-depth dist