Using a quadrupole mass spectrometer, a secondary neutral mass spectrometry (SNMS) instrument can be realized at relatively low cost. However, such a mass analyser is only suitable for nominal mass resolution, therefore sometimes intensities of mostly diatomic clusters or double-charged ions superim
β¦ LIBER β¦
In-depth concentration profile information through analysis of the entire XPS peak shape
β Scribed by S. Tougaard
- Publisher
- Elsevier Science
- Year
- 1988
- Tongue
- English
- Weight
- 290 KB
- Volume
- 32
- Category
- Article
- ISSN
- 0169-4332
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Secondary ion yields are known to be strongly enhanced by the presence of oxygen in the analysed sample. The magnitude of the yield enhancement is often signiΓcantly di β erent for impurity and matrix ion species. This kind of SIMS matrix e β ect severely aggravates concentration calibration in depth