The thermal stability of tungsten silicide contacts to AlGaAs
β Scribed by Morgan, D. V. ;Thomas, H. ;McClatchie, S. ;Christou, A. ;Marazas, B. ;Diskett, D. J.
- Publisher
- John Wiley and Sons
- Year
- 1993
- Tongue
- English
- Weight
- 161 KB
- Volume
- 138
- Category
- Article
- ISSN
- 0031-8965
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π SIMILAR VOLUMES
NiPt (10% Pt) and Pt were investigated as alternatives to Ni for contact formation to SiGe (20%) source/drain. The germanosilicide phase formation and morphology were studied by means of sheet resistance measurements, X-ray diffraction (XRD) analysis and scanning electron microscopy (SEM) inspection
The thermal stability of W/ Pt / doping element / Pd and Pt / doping element / Pd ohmic contacts with Ge, Si, and Sn in the position of doping elements were investigated. Two stability tests were made, the first at 4008C and the second at 1958C. The obtained results were compared to the ageing of W(