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The synthesis and characterization of phosphorus-doped diamond films using trimethyl-phosphite as a dopping source

✍ Scribed by Chen, Chia-Fu; Lo, Shiow-Fang; Chen, Sheng-Hsiung


Book ID
123287487
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
619 KB
Volume
5
Category
Article
ISSN
0925-9635

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The Ðlms addressed here were grown using adamantane vapour in Γ‘owing argon/nitrogen mixtures in an (C 10 H 16 ) inductively-coupled plasma processing (ICP) vacuum rig. The Ðlms were characterized by XPS, AES, infrared spectroscopy (Fourier transform infrared (FTIR) in transmission) and atomic force