Characterization of carbon nitride films grown using an inductively-coupled plasma with adamantane as the source hydrocarbon
✍ Scribed by Zeze, D. A.; O'Toole, E. P.; Crawford, R. I.; Cui, N.; Anderson, C. A.; Brown, N. M. D.
- Publisher
- John Wiley and Sons
- Year
- 1998
- Tongue
- English
- Weight
- 190 KB
- Volume
- 26
- Category
- Article
- ISSN
- 0142-2421
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✦ Synopsis
The Ðlms addressed here were grown using adamantane vapour in Ñowing argon/nitrogen mixtures in an (C 10 H 16 ) inductively-coupled plasma processing (ICP) vacuum rig. The Ðlms were characterized by XPS, AES, infrared spectroscopy (Fourier transform infrared (FTIR) in transmission) and atomic force microscopy. The x-ray photoelectron data showed typically high nitrogen contents, and deconvolution of the observed C 1s band conÐrmed the presence of the chemical states identiÐed by FTIR. Further XPS-quantiÐed data established the changes observed in the relative carbon and nitrogen concentrations as a function of deposition regime.
Evidence of a structural transformation in the Ðlms over time was established from the FTIR spectra, which exhibited signiÐcant changes in the relative intensities of the CyN, CxN/CxC, NH and CH bands identiÐed attendant on the deposition parameters.
Analysis by AES revealed additionally an increasing carbon/nitrogen ratio, suggesting the transformation of sp3 to sp3 carbon was taking place in the Ðlm, with some nitrogen lost from the Ðlms during data acquisition. These data indicated clearly that the electron beam-stimulating production of the Auger spectra contributed to the transformation of the chemical states present initially.
Finally, atomic force microscopy of the surfaces showed that the surface morphology of the Ðlm changes during Auger analysis.