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The surface roughness and optical properties of high quality Si epitaxial layers

✍ Scribed by V. Nayar; C. Pickering; A.J. Pidduck; R.T. Carline; W.Y. Leong; D.J. Robbins

Book ID: 107864158
Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 828 KB
Volume: 233
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(93)90057-v

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