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The study of carbon film on the surface of N + B ion implanted layer

โœ Scribed by Dehua Yang; Xushou Zhang; Qunji Xue

Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
427 KB
Volume
214
Category
Article
ISSN
0040-6090

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Measurements of the density of etch-pits on iron-37; silicon show that in deformed specimens the dislocation density is highest at the surf8ce and decreases with distance from the surface. At depths greater than 100 the dislocation density remains constant. As measured by the stress required for th