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On the nature of the disordered layer produced by ion implantation

โœ Scribed by K. Zellama; P. Germain; S. Squelard; J.C. Bourgoin; J. Piaguet; J.Y. Robic


Publisher
Elsevier Science
Year
1978
Tongue
English
Weight
345 KB
Volume
26
Category
Article
ISSN
0038-1098

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