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The structure of Mo/Si multilayers prepared in the conditions of ionic assistance

✍ Scribed by E.N. Zubarev; V.V. Kondratenko; V.A. Sevryukova; S.A. Yulin; T. Feigl; N. Kaiser


Book ID
106020876
Publisher
Springer
Year
2007
Tongue
English
Weight
364 KB
Volume
90
Category
Article
ISSN
1432-0630

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