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Structure and stressed state of molybdenum layers in Mo/Si multilayers

✍ Scribed by V.I. Pinegyn; E.N. Zubarev; V.V. Kondratenko; V.A. Sevryukova; S.A. Yulin; T. Feigl; N. Kaiser

Book ID
108289958
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
516 KB
Volume
516
Category
Article
ISSN
0040-6090

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We investigate the influence of the Mo crystalline state (quasi-amorphous or crystalline) on the thermal stability of Mo/Si thin film multilayers with B 4 C diffusion barrier layers at either of the two interfaces. We find that multilayers containing amorphous Mo layers are more stable than those co