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The structure of amorphous silicon nitride films

✍ Scribed by M. V. Coleman; D. J. D. Thomas

Publisher: John Wiley and Sons
Year: 1968
Tongue: English
Weight: 557 KB
Volume: 25
Category: Article
ISSN: 0370-1972
DOI: 10.1002/pssb.19680250123

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