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The structural deformations in the Si/SiGe system induced by thermal annealing

✍ Scribed by Shuqi Zheng; M. Mori; T. Tambo; C. Tatsuyama

Publisher: Springer
Year: 2007
Tongue: English
Weight: 563 KB
Volume: 42
Category: Article
ISSN: 0022-2461
DOI: 10.1007/s10853-006-0901-2

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