Changes in the SIPOS/Si interface induced by annealing at 900°C

✍ Scribed by KM Brunson; D Sands; JG Simmons; CB Thomas

• Publisher: Elsevier Science
• Year: 1988
• Tongue: English
• Weight: 301 KB
• Volume: 38
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(88)90082-6