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The structural correlation and mechanical properties in amorphous silicon nitride under densification

✍ Scribed by Le, Van-Vinh; Nguyen, Thi-Trang; Pham, Khac-Hung


Book ID
121447055
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
776 KB
Volume
363
Category
Article
ISSN
0022-3093

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As-deposited a-SiNx:H (0:1 Β‘ x Β‘ 0:9) thin ΓΏlms prepared by evaporation of silicon under a ow of nitrogen and hydrogen ions exhibit visible photoluminescence at room temperature without any posttreatment. The nitrogen concentration was determined by X-ray photoemission spectroscopy. The structural c