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The Simulation of Polycrystalline Silicon Thin Film Deposition in PECVD System

✍ Scribed by Wang, Zhi Jian; Shang, Xiao Feng

Book ID: 121862155
Publisher: Trans Tech Publications, Ltd.
Year: 2011
Tongue: English
Weight: 378 KB
Volume: 189-193
Category: Article
ISSN: 1662-8958
DOI: 10.4028/www.scientific.net/AMR.189-193.2032

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