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The role of silicon interstitials in the deactivation and reactivation of high concentration boron profiles

✍ Scribed by Maria Aboy; Lourdes Pelaz; Luis A. Marqués; Pedro López; Juan Barbolla; V.C. Venezia; R. Duffy; Peter B. Griffin

Book ID: 108215100
Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 108 KB
Volume: 114-115
Category: Article
ISSN: 0921-5107
DOI: 10.1016/j.mseb.2004.07.056

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