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Oxygen precipitation in silicon: The role of strain and self-interstitials

✍ Scribed by Taylor, W. J.; Tan, T. Y.; Gösele, U. M.

Book ID: 121800634
Publisher: American Institute of Physics
Year: 1991
Tongue: English
Weight: 612 KB
Volume: 59
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.106136

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