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The role of secondary electrons in electron-beam-induced-deposition spatial resolution

✍ Scribed by N. Silvis-Cividjian; C.W. Hagen; L.H.A. Leunissen; P. Kruit

Book ID: 114155443
Publisher: Elsevier Science
Year: 2002
Tongue: English
Weight: 257 KB
Volume: 61-62
Category: Article
ISSN: 0167-9317
DOI: 10.1016/s0167-9317(02)00515-4

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