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Electron range effects in focused electron beam induced deposition of 3D nanostructures

✍ Scribed by Tristan Bret; Ivo Utke; Patrik Hoffmann; Maurice Abourida; Pascal Doppelt

Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
395 KB
Volume
83
Category
Article
ISSN
0167-9317

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πŸ“œ SIMILAR VOLUMES

Influence of the beam scan direction dur
Influence of the beam scan direction during focused electron beam induced deposition of 3D nanostructures
✍ Tristan Bret; Ivo Utke; Patrik Hoffmann πŸ“‚ Article πŸ“… 2005 πŸ› Elsevier Science 🌐 English βš– 357 KB

We present evidence that during focused electron beam induced deposition of 3D micro-and nanostructures, different growth rates are obtained when scanning the beam towards different directions, as well as on different sides of a growing structure. The effects of electron scattering are taken into ac