Resolution in New Nanofabrication Technique Combining Electron-Beam-Induced Deposition and Low-Energy Ion Milling

✍ Scribed by Mitsuishi, Kazutaka; Shimojo, Masayuki; Tanaka, Miyoko; Takeguchi, Masaki; Furuya, Kazuo

• Book ID: 123617798
• Publisher: Institute of Pure and Applied Physics
• Year: 2005
• Tongue: English
• Weight: 186 KB
• Volume: 44
• Category: Article
• ISSN: 0021-4922
• DOI: 10.1143/JJAP.44.5627