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Dynamic profile calculation of deposition resolution by high-energy electrons in electron-beam-induced deposition

โœ Scribed by K. Mitsuishi; Z.Q. Liu; M. Shimojo; M. Han; K. Furuya


Book ID
108291626
Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
394 KB
Volume
103
Category
Article
ISSN
0304-3991

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