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The role of plasmatron/magnetron systems in physical vapor deposition techniques

✍ Scribed by S. Schiller; U. Heisig; K. Goedicke

Publisher: Elsevier Science
Year: 1978
Tongue: English
Weight: 900 KB
Volume: 54
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(78)90274-2

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