A new concept for physical vapor deposition coating combining the methods of arc evaporation and unbalanced-magnetron sputtering

✍ Scribed by W.-D. Münz; F.J.M. Hauzer; D. Schulze; B. Buil

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 741 KB
• Volume: 49
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/0257-8972(91)90049-3