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The role of oxygen on the stability of gettering of metals to cavities in silicon

✍ Scribed by Williams, J. S.; Conway, M. J.; Wong-Leung, J.; Deenapanray, P. N. K.; Petravic, M.; Brown, R. A.; Eaglesham, D. J.; Jacobson, D. C.


Book ID
118272498
Publisher
American Institute of Physics
Year
1999
Tongue
English
Weight
427 KB
Volume
75
Category
Article
ISSN
0003-6951

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