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The annealing of helium-induced cavities in silicon and the inhibiting role of oxygen

✍ Scribed by J.H. Evans; A. Van Veen; C.C. Griffioen

Book ID: 113278135
Publisher: Elsevier Science
Year: 1987
Tongue: English
Weight: 577 KB
Volume: 28
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(87)90176-5

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